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PECVD treatment (6.8nm) |
| Cluster on gold layer (10nm) |
| Cristallites (4nm) on HMDS layer |
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PECVD treatment (6.8nm) |
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| Collaboration: V. Rouessac and A. Deratani, IEM, Montpellier (France) |
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| |  | | Direct steps visualization | | | | | Measurement of height deposition | | | | |
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| |  | | Standard surf | | |  | | Plug-in Sarfus 3D | | |  | | Optical Microscope with DIC mode | | | | |
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PECVD of hexamethyldisiloxane (HDMSO) is carried out on a standard surf. The step height obtained with Sarfusoft is 6.8 nm (optical thickness : 10 nm) , in agreement with values obtained by ellipsometry (6.9 nm). |
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