Measurement is made possible through the determination of the color/thickness correspondence in Sarfus pictures.
Each set of colors on the Sarfus picture corresponds to a thickness of the film deposited on the Surf.
To ensure a correspondence between color and thickness in any case, a calibration standard made of nanometric steps and a specific software developed by Nanolane are used. |
| |
|
| |
| Calibration standard |
| To ensure a correspondence between color and thickness in any case, a calibration standard made of nanometric steps and a specific software (Sarfusoft) developed by Nanolane are used. |
 |
| |
| Calibration curve |
| Each step of the calibration standard is selected. The RGB parameters of each step are calculated and their step heights are loaded. A regression law between these two parameters is calculated. |
 |
| |
| Sample Image(s) |
| One or several images are loaded and RGB parameters of each pixel are converted into a thickness value according to the calibration curve. |
 |
| |
| Metrological Images |
| 2D optical images can be converted into 3D metrological images. This fast and simple colorimetric conversion is extremely precise and givies images whith high dimensional accuracy (<1nm). Operations such as roughness measurement, profile extraction, step height measurements... are then easily accessible. |
 |
| |
| Some 3D images |
 |  | | Lithographic structure | Liquid crystal (8CB) spreading |  |  | | Liquid crystal (8CB) spreading | Biochip |
|
