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PECVD treatment (6.8nm) |
| Cluster on gold layer (10nm) |
| Cristallites (4nm) on HMDS layer |
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Cluster on gold layer (10nm) |
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| |  | | Quality control of layers | | | | | Fast and easy control | | | | | Non-contact / non-invasive technique | | | | |
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| |  | | Standard surf SiO2 | | |  | | Optical Microscope with DIC mode | | | | |
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Gold layer (10nm) is deposited on substrates by evaporation in vaccum. The quality of the layer is controled on a standard Surf. Sarfus analysis shows the presence of gold clusters on the surface.
Gold clusters displays lateral diameters from some micrometers to few tens of micrometers. Around each cluster, a darker area is visible suggesting atoms depletion. Some of them display porous like structures. In place, their distribution on the surface seems to be regular.
(bar scale: 20µm) |
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