The traceability program included two issues:
- Certification of the steps thickness for our calibration standards by an official institute in metrology. The work was performed by the PTB in Germany on two NANOLANE calibration standards which are now used as primary standard.
- Definition of an internal procedure for calibration. The performed procedure follows the EN ISO/IEC 17025 and allows certifying the commercialized calibration standards on the basis of the certified primary standard.
All calibration standards now available with SARFUS 3D correspond to these requirements. SARFUS 3D is the advanced system commercialized by NANOLANE which allows real-time visualisation and measurement of nanometric structures. The innovative technique based on the use of an optical microscope combines an extreme sensitivity (less than 1nm) to a large field of view (up to a millimetre). The tool enables the optical thickness measurement of transparent layers in the range from 1 to 60nm with repeatability less than 0.3nm.
About PTB: The Physikalisch-Technische Bundesanstalt ( www.ptb.de) is the National lnstitute for Science and Technology and is the highest technical authority of Germany. PTB measures with the highest accuracy and reliability – metrology as the core competence - and meets the requirements for calibration and testing laboratories as defined in the EN ISO/IEC 17025. To ensure worldwide coherence of measures, the PTB cooperates with other national metrology institutes within EUROMET on the regional European level an on the international level within the framework of the Metre Convention.
About NANOLANE: NANOLANE ( www.nano-lane.com), specialized in optical solutions at nanoscale, commercializes an innovative quantitative technique called Sarfus which extends the analysis possibilities in the fields of nanotechnologies. The applications include for example rapid defect visualization of soft lithography, quality control of DNA biochips, direct visualization and measurement of nanolithography patterns, thin films and surface treatment studies, dynamic studies of crystallization and wetting applications, as well as direct behaviour and morphology characterization of nanotubes and nanowires. NANOLANE is one of the subsidiaries of EOLANE, (holdings of nine companies) whose main activity is the conception and the manufacture of professional electronic materials. EOLANE has a sales turnover of more than 145 M€, including 30% export and employs more than 1,100 people.
Contact: NANOLANE – Ingrid LISADOR - Parc des Sittelles - F-72450 Montfort-le-Gesnois Ph: +33 (0)2 43 54 09 00 - Fax: +33 (0)2 43 54 09 09 - nanolane@eolane.com |