Biochips

Spot of a DNA Biochip

SiO2 surface structured by optical lithography and coated with epoxy silane and DNA

Collaboration: A. Offenhäuser, R. Ghosh Moulick, S. Gilles (INSTITUT FÜR BIO & NANOSYSTEME (IBN2), Jülich, Germany)


		Quality control of chip

		Optical tchickness measurement

		No labelling

Determination of their shape


		Standard surf SiO2

		Plug-in Sarfus 3D

		Optical Microscope with DIC mode

The elevated microsquare structures are resist residues.

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