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PECVD treatment (6.8nm) |
| Cluster on gold layer (10nm) |
| Cristallites (4nm) on HMDS layer |
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Cristallites (4nm) on HMDS layer |
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| |  | | Quality control of layers | | | | | Fast and easy control | | | | | Non-contact / non-invasive technique | | | | |
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| |  | | Standard surf SiO2 | | |  | | Plug-in Sarfus 3D | | |  | | Optical Microscope with DIC mode | | | | |
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HexaMethylDiSilazane (HMDS) is deposited on a standard Surf by Chemical Vapor Deposition (CVD). Initially, the substrate displays perfect flat surface. But when the substrate is cooled at 4°C overnight, HMDS cristallites are observed on the surface.
The meanheight of these structures varies from 2.5 to 5nm and theirs widths are around 1µm. Heating the sample until 50°C leads to the melting of the cristallites. |
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